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Sifat Optik Lithium Tantalat (Litao3) Diatas Substrat Silikon (100) Tipe-P Bervariasi Suhu

Agus Ismangil, Irmansyah Irmansyah, Irzaman Irzaman

Abstract


Lithium tantalit, yang memiliki rumus kimia LiTaO3, film tipis telah tumbuh pada tipe-p Si substrat (100) dengan menggunakan deposisi larutan kimia dan teknik spin coating pada kecepatan 3000 rpm selama 30 detik. film tipis LiTaO3 dibuat konsentrasi 2,5 juta dan pada suhu anil 550 ° C, 600 ° C, 650 ° C, 700 ° C, 750 ° C, dan 800 ° C. Ini film tipis yang ditandai dengan menggunakan spektroskopi laut optik dan LCR meter. Hasil penelitian menunjukkan bahwa serapan puncak tertinggi film LiTaO3 adalah pada suhu 800 ° C dengan panjang gelombang di atas 800 nm. Hal ini menunjukkan bahwa film LiTaO3 adalah bahan semikonduktor.

Keywords


LiTaO3, absorbance, spin coating, annealing, semiconductor

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